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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/9804

    Title: 快速熱處理對濺鍍CIS 薄膜太陽電池吸收層影響之研究
    Authors: 黃景良
    Contributor: 圖書資訊館
    Keywords: 二硒化銅銦
    Date: 2010-03-20
    Issue Date: 2010-04-22 16:37:23 (UTC+8)
    Abstract: 本論文主要是研究快速熱處理對濺鍍CIS薄膜太陽電池吸收層性能影響,該CIS薄膜太陽電池採用鈉鈣玻璃為薄膜基材,利用真空濺鍍(Sputter)技術在鈉鈣玻璃基材鍍製薄膜太陽能電池的吸收層CuInSe2薄膜,利用0.25 kw的功率鍍製出原子比例及緻密性較佳的CuInSe2薄膜,為了製作出表面平滑、顆粒均勻和具有優良的光電性能的CuInSe2薄膜,故利用一種快速熱處理(Rapid ThermalProcessing,RTP)技術來對薄膜進行快速熱處理後,使CuInSe2薄膜得到有如下幾點改良:(1)CIS薄膜的有更佳的晶體結構(2)CIS薄膜的表面型態更平滑和顆粒更均勻(3)CIS薄膜有更好的光電特性。
    Appears in Collections:[Graduate School and Department of Mechhanical Engineering ] 20th National Conference on Combustion and Energy

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