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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/9803


    Title: Phase shifts and energy dissipations of several modes of AFM: Minimizing topography and dissipation measurement errors
    Authors: 林水木
    Shueei-Muh Lin
    Cheng-Che Lin
    Contributor: 機械工程系
    Keywords: AFM
    Analytical solution
    Phase angle
    Measurement errors
    Date: 2010-01-05
    Issue Date: 2010-04-22 16:37:17 (UTC+8)
    Abstract: For clear interpretation of a sample’s surface properties, several simple and general relations between
    phase shifts of atomic force microscopy (AFM) and sample’s properties are derived. The topography and
    dissipation measurement errors due to some inherent uncertainties are investigated. For derivation of
    these simple and general relations among measuring signals and sample’s properties, the dynamic behavior
    of a cantilever is simulated into a mass-spring-damper model. In general, the conventional model can
    determine the first mode only. The dynamic effective spring theory is introduced here. Based on this
    theory, the conventional model can be modified to accurately determine the dynamic motions of higher
    modes of a cantilever. If the dynamic behavior is almost harmonic, the exact dynamic response of the
    general system subjected to arbitrary tip–sample force is derived. Moreover, several simple and general
    relations among dynamic responses of AFM and sample’s properties are discovered. Based on these relations,
    the errors of measuring a sample’s surface properties due to the inherent measuring uncertainties
    are investigated. Finally, some methods to minimize the error of measurement are proposed.
    Relation: Precision Engineering 33 (2009) 371–377
    Appears in Collections:[機械工程系所] 期刊論文

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