English  |  正體中文  |  简体中文  |  Items with full text/Total items : 25214/25809 (98%)
Visitors : 5149238      Online Users : 65
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/9666


    Title: Intelligent Scanning Probe Microscope System Design
    Authors: Po-Kuang Chang
    Jium-Ming Lin
    Contributor: 圖書資訊館
    Keywords: Scanning Probe Microscope
    Force Actuator
    Hysteresis Effect
    Neural-Fuzzy Control
    Date: 2008-11-08
    Issue Date: 2010-04-13 16:26:39 (UTC+8)
    Abstract: This research applied both the traditional PI
    (Proportion and Integration) compensator and the
    neural-fuzzy control methods for a Scanning Probe
    Microscope (SPM) system design. In addition, the
    actuator hysteresis effect was taken into consideration.
    It can be seen that the system performances in input
    command tracking capability as well as the linearity
    obtained by the neural-fuzzy controller were much
    better, especially in eliminating the actuator hysteresis
    effect. This method was not proposed before, and the
    improvement has been verified by MATLAB
    simulation as well as practical imple- mentation of a
    surface profiler.
    Appears in Collections:[機械工程系所] SME 2008第六屆全國精密製造研討會-國際製造工程學會中華民國分會

    Files in This Item:

    File Description SizeFormat
    A03-04本文.pdf483KbAdobe PDF22View/Open


    All items in KSUIR are protected by copyright, with all rights reserved.


    本網站之所有圖文內容授權為崑山科技大學圖書資訊館所有,請勿任意轉載或擷取使用。
    ©Kun Shan University Library and Information Center
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback