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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/9666

    Title: Intelligent Scanning Probe Microscope System Design
    Authors: Po-Kuang Chang
    Jium-Ming Lin
    Contributor: 圖書資訊館
    Keywords: Scanning Probe Microscope
    Force Actuator
    Hysteresis Effect
    Neural-Fuzzy Control
    Date: 2008-11-08
    Issue Date: 2010-04-13 16:26:39 (UTC+8)
    Abstract: This research applied both the traditional PI
    (Proportion and Integration) compensator and the
    neural-fuzzy control methods for a Scanning Probe
    Microscope (SPM) system design. In addition, the
    actuator hysteresis effect was taken into consideration.
    It can be seen that the system performances in input
    command tracking capability as well as the linearity
    obtained by the neural-fuzzy controller were much
    better, especially in eliminating the actuator hysteresis
    effect. This method was not proposed before, and the
    improvement has been verified by MATLAB
    simulation as well as practical imple- mentation of a
    surface profiler.
    Appears in Collections:[機械工程系所] SME 2008第六屆全國精密製造研討會-國際製造工程學會中華民國分會

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