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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/9644


    Title: Design and Fabrication of MEMS-Based Gas Chromatography Columns
    Authors: Chia-Yen Lee
    Shih-Chuan Chen
    Wen-Chen Kuo
    Che-Hsin Lin
    Che-Ming Chiang
    Contributor: 圖書資訊館
    Keywords: Bulk
    Micromachining
    Gas
    Chromatography (GC)
    Microfluidic Chips
    Thermal Bonding
    Date: 2008-11-08
    Issue Date: 2010-04-13 11:17:15 (UTC+8)
    Abstract: This paper exploits the realization of high
    performance but potentially low cost GC column using
    bulk etching for portable gas analysis system. A
    platinum layer is atterned on a Pyrex 7740 glass wafer
    to form a heater. Silicon nitride is used to form a etch
    mask in a wet-etching process. The final channel
    patterns are fabricated using RIE to define the silicon
    nitride mask for the following KOH wet-etching. After
    the channels are etched, the glass wafer was bonded as a
    top plate to form the columns. The micro gas
    chromatography chip (GC-on-a-chip) is then completed
    with trapezoid-cross-section columns. Experimentally,
    it is shown that the MEMS-based GC columns have the
    same performance compared with commercial fused
    silica capillary columns.
    Appears in Collections:[機械工程系所] SME 2008第六屆全國精密製造研討會-國際製造工程學會中華民國分會

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