To estimate the fluorine thermal stability of fluorine doped zincoxide (ZnO:F) films, ZnO:F films were prepared by co-sputteringzinc oxide (ZnO) and magnesium fluoride (MgF2) targets underdifferent sputtering powers. The prepared films were tested with athermal desorption system heated from room temperature to 500oC.Four elements: zinc (Zn), oxygen (O), magnesium (Mg) and fluorine(F) from ZnO:F films exhibit clear and similar thermal desorptionbehavior. The result indicates prepared ZnO:F films will desorbcorresponding to low bound strength under 100oC heat treatment,and exhibit multilayer instead of layer by layer desorption behaviorbased on Polanyi-Wigner model.Fluorine is thermally unstable for ZnO:F films evidenced bythermal desorption test. Electrical and optical properties of ZnO:Ffilms after thermal desorption test become negative. This workcontributes to display or solar industry if ZnO:F films are consideredto be the transparent conductive oxide films.
Electronic Materials and Packaging, 2008. EMAP 2008. International Conference on p.25-28 ,22-24 Oct. 2008