Kun Shan University Institutional Repository:Item 987654321/3597
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    题名: Modeling and simulation of non-uniformity in the planarization process
    作者: 洪興林(HorngThin-Lin)
    关键词: Non-uniformity
    Material removal
    Deformation
    Planarization
    日期: 2009-03-19
    上传时间: 2009-08-15 00:54:16 (UTC+8)
    摘要: The estimation of surface non-uniformity undervarious machining parameters (such as dressing force,diamond density of dresser, rotational speed of dresser,different machining paths, etc.) is essential to the planarizationprocess. Based on abrasive theory and the deformationanalyses of a polishing pad, this paper develops a model tocalculate material removal in the planarization process andthen calculate non-uniformity by using this model. Theresults reveal that the non-uniformity is in good agreementwith experimental data. Moreover, it was found that thenon-uniformity decreased when the dressing time increased.
    關聯: Int J Adv Manuf Technol (2008) 39:512–520
    显示于类别:[機械工程系所] 期刊論文

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    洪興林-97獎助申請表(論文刊登)論文2-Modeling and Simulation of Non-Uniformity in the Planarization Process.pdf492KbAdobe PDF609检视/开启


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