English  |  正體中文  |  简体中文  |  Items with full text/Total items : 26450/27046 (98%)
Visitors : 12193336      Online Users : 287
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version

    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/3597

    Title: Modeling and simulation of non-uniformity in the planarization process
    Authors: 洪興林(HorngThin-Lin)
    Keywords: Non-uniformity
    Material removal
    Date: 2009-03-19
    Issue Date: 2009-08-15 00:54:16 (UTC+8)
    Abstract: The estimation of surface non-uniformity undervarious machining parameters (such as dressing force,diamond density of dresser, rotational speed of dresser,different machining paths, etc.) is essential to the planarizationprocess. Based on abrasive theory and the deformationanalyses of a polishing pad, this paper develops a model tocalculate material removal in the planarization process andthen calculate non-uniformity by using this model. Theresults reveal that the non-uniformity is in good agreementwith experimental data. Moreover, it was found that thenon-uniformity decreased when the dressing time increased.
    Relation: Int J Adv Manuf Technol (2008) 39:512–520
    Appears in Collections:[機械工程系所] 期刊論文

    Files in This Item:

    File Description SizeFormat
    洪興林-97獎助申請表(論文刊登)論文2-Modeling and Simulation of Non-Uniformity in the Planarization Process.pdf492KbAdobe PDF612View/Open

    All items in KSUIR are protected by copyright, with all rights reserved.

    ©Kun Shan University Library and Information Center
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback