Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy

Kun Shan University Institutional Repository > 教學單位 > 工程學院 > 機械工程系所 > 期刊論文 > Item 987654321/3585

Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/3585

Title:	Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy
Authors:	HorngThin-Lin (洪興林)
Keywords:	Modal superposition method Flexural vibration problem Nanomachining process Tip holder Atomic force microscope (AFM)
Date:	2009-03-19
Issue Date:	2009-08-15 00:47:50 (UTC+8)
Abstract:	An analytical solution is developed to deal with the flexural vibration problem during ananomachining process which involves an atomic force microscope (AFM) cantilever. Themodal superposition method is employed to analyze the response of an AFM subjected to acutting force with an excitation force of an arbitrarily chosen frequency. The cutting forceswere transformed into distributed transversal and bending loading, and were applied tothe end region of the AFM by means of the tip holder. The effects of transverse stress andbending stress were adopted to solve the dynamic model. Based on the result, applying acutting force with an excitation force near the high-order modal frequencies and using awide tip holder are recommended when nanoscale processing using AFM is performed.
Relation:	journal of materials processing technology 2 0 9 ( 2 0 0 9 ) 2940–2945
Appears in Collections:	[機械工程系所] 期刊論文

Files in This Item:

File	Description	Size	Format
洪興林-97獎助申請表(論文刊登)論文3-Analytical Solution of Flexural Vibration Responses on Nanoscale Processing Using Atomic Force MicroscopyPROTEC_12252.pdf		815Kb	Adobe PDF	1155	View/Open