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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/3585


    Title: Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy
    Authors: HorngThin-Lin (洪興林)
    Keywords: Modal superposition method
    Flexural vibration problem
    Nanomachining process
    Tip holder
    Atomic force microscope (AFM)
    Date: 2009-03-19
    Issue Date: 2009-08-15 00:47:50 (UTC+8)
    Abstract: An analytical solution is developed to deal with the flexural vibration problem during ananomachining process which involves an atomic force microscope (AFM) cantilever. Themodal superposition method is employed to analyze the response of an AFM subjected to acutting force with an excitation force of an arbitrarily chosen frequency. The cutting forceswere transformed into distributed transversal and bending loading, and were applied tothe end region of the AFM by means of the tip holder. The effects of transverse stress andbending stress were adopted to solve the dynamic model. Based on the result, applying acutting force with an excitation force near the high-order modal frequencies and using awide tip holder are recommended when nanoscale processing using AFM is performed.
    Relation: journal of materials processing technology 2 0 9 ( 2 0 0 9 ) 2940–2945
    Appears in Collections:[機械工程系所] 期刊論文

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