Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy

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Title:	Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy
Authors:	HorngThin-Lin (洪興林)
Keywords:	Modal superposition method Flexural vibration problem Nanomachining process Tip holder Atomic force microscope (AFM)
Date:	2009-03-19
Issue Date:	2009-08-15 00:47:50 (UTC+8)
Abstract:	An analytical solution is developed to deal with the flexural vibration problem during ananomachining process which involves an atomic force microscope (AFM) cantilever. Themodal superposition method is employed to analyze the response of an AFM subjected to acutting force with an excitation force of an arbitrarily chosen frequency. The cutting forceswere transformed into distributed transversal and bending loading, and were applied tothe end region of the AFM by means of the tip holder. The effects of transverse stress andbending stress were adopted to solve the dynamic model. Based on the result, applying acutting force with an excitation force near the high-order modal frequencies and using awide tip holder are recommended when nanoscale processing using AFM is performed.
Relation:	journal of materials processing technology 2 0 9 ( 2 0 0 9 ) 2940–2945
Appears in Collections:	[機械工程系所] 期刊論文

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