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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/2355

    Title: TiN薄膜之光學與導電特性探討
    Authors: 徐有男
    Keywords: 氮化鈦
    Date: 2008-03-19
    Issue Date: 2009-08-12 18:12:14 (UTC+8)
    Abstract: 本研究之重點是研究如何成長具透光性且導電性能佳之氮化鈦(TiN)薄膜,本研究之實驗會以Ti為靶材經DC磁控濺射成長TiN膜於玻璃基板上,將電壓及氮氬氣比例固定而改變濺鍍製程時間,量測TiN鍍膜之導電性及透光性,尋找最佳之鍍膜條件,藉以獲得可應用於LED電極之鍍膜。
    Appears in Collections:[電機工程系所] 學生專題

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