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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/20362

    Authors: Chang, Ming
    Po-Cheng Chen
    Guan-Lin Su
    Contributors: Department of Mechanical Engineering, Chung Yuan Christian University
    Keywords: mirau type microscopic interferometer
    low coherence interferometry
    transparent surfaces
    profile measurement
    Date: 2013-11-02
    Issue Date: 2013-11-14 14:29:19 (UTC+8)
    Abstract: In this study, a rapid full-field surface profile measurement system for objects with transparent surfaces is developed. The measurement is executed with a Mirau type microscopic interferometer accompanied by a single vertical scanning stage and an auto- ocusing algorithm. Based on the idea of shape from focus and the characteristic of interference forming only when the optical path of two beams of low coherent light is close, it enhances the high-frequency signal at the focusing position of transparent surfaces and achieves the purpose of high precision positioning. Experiments were carried out with both micro profile evaluation for a small part of objects and full-field macro profile inspection via an X-Y stage. The scope for horizontal measurement is defined within the travelling range of X-Y stage and the maximum vertical scanning stroke is 20 mm offered by the adopted Z stage. Dependent on the sampling spacing and travel range in vertical scanning, the positioning time for a single measurement is usually 0.1~1.5 seconds. Conducting the measurement with a 20X Mirau interferometric objective lens the current measuring accuracy has reached sub-micrometer level.
    Appears in Collections:[機械工程系所] Automation 2013- The 12th International Conference on Automation Technology

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