Kun Shan University Institutional Repository:Item 987654321/20356
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    题名: REDUCED STRESS OF GAN FILM ON SAPPHIRE USING AUTOMATIC FABRICATION OF TRENCH STRUCTURES
    作者: C.F.Hsieh
    C. W. Chen
    C. H. Chen
    M. H. Liao
    贡献者: Industrial Technology Research Institute (ITRI)
    Department of Mechanical Engineering, National Taiwan University
    关键词: Automation
    Stress
    GaN
    Curvature
    Laser
    Surface Structure
    日期: 2013-11-02
    上传时间: 2013-11-14 12:00:04 (UTC+8)
    摘要: Because of the different thermal expansion coefficients in these two materials, serious curvature and residual stress are existed during the growth of an epi-GaN layer on Sapphire. By using theoretical calculation and a simulation model analysis using the finite element method to describe the realistic shape of wafer curvature on epi-GaN wafers, we examine the influence which different thickness and thermal expansion coefficients in the top epi-GaN layer have on wafer curvature released. In addition a new automatic process to reduce wafer curvature and to relax residual stress is proposed. With an additional laser treatment on a sample surface after the growth of the top epi-GaN layer on a Sapphire substrate has taken place, the wafer curvature can be reduced from the original 45 m to 37 m in 2 inch wafer with an optimized surface structure design.
    显示于类别:[機械工程系所] Automation 2013- The 12th International Conference on Automation Technology

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