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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/20291

    Title: 低干涉運動3軸向快速刀具伺服裝置之研發
    Development of a 3-axis Fast Tool Servo with Low Interference Motions
    Authors: 劉永田
    Date: 2013-11-01
    Issue Date: 2013-11-07 10:57:22 (UTC+8)
    Abstract: 為因應微鏡片陣列及大量微細溝槽之超精密加工,本研究研發具低干涉運動、高剛性和與快速響應等優點之3軸向快刀伺服裝置(FTS),期能進行區域快速加工,以提高生產效率。
    Appears in Collections:[機械工程系所] 國家科學委員會自動化學門101年度專題計畫成果發表會

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