English  |  正體中文  |  简体中文  |  Items with full text/Total items : 25459/26053 (98%)
Visitors : 6694543      Online Users : 44
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: https://ir.lib.ksu.edu.tw/handle/987654321/20254


    Title: AN EFFICIENT WAY TO EXTEND THE DYNAMIC RANGE OF NANO-BIO-CHIP SENSORS IN AUTOMATIC MEASUREMENT
    Authors: Lin, P.H.(Tom)
    G.W.Lee
    C.M.Jan
    C.K.Lee
    Contributor: National Taiwan University Department of Engineering Science and Ocean Engineering
    National Taiwan University Institute of Applied Mechanics
    Keywords: Ellipsometry
    Optical metrology
    ITO thin layer
    Nano-Bio-Sensor
    Date: 2013-11-02
    Issue Date: 2013-11-06 16:07:42 (UTC+8)
    Abstract: Based on previous studies and works on the development of OBMorph (Opto-BioMorphin) system in our group, a newly developed interferometric ellipsometer integrated with a quadrature interferometer was design and constructed for ellipsometry measurement. This paper advanced an efficient way to extend the dynamic range upon angular interrogation and the modulation of equivalent index change on ITO (indium-tin-oxide) film layer caused by the change of surface plasmon coupling as the externally DC and AC voltage applied. Our experimental data showed three times extending of dynamic range was reasonably practicable while compared with the traditional phase detection. The fourth digit order variations of equivalent indices on ITO can be observed and be enough to overcome the lack of dynamic range for point-wise measurement. The significant features of our system are miniaturization, high sensitivity, high resolution (to the fourth digit order), wide dynamic range and real-time monitoring in order to measure the thin-film structure and biomolecular interactions fast and precisely under solid or liquid surroundings. The long-term goal of this work will be on real-time monitoring of thin-film manufactures and clinically biomedical diagnosis.
    Appears in Collections:[機械工程系所] Automation 2013- The 12th International Conference on Automation Technology

    Files in This Item:

    File Description SizeFormat
    K001.pdf12KbAdobe PDF240View/Open
    MEMS_FULL_0001.pdf656KbAdobe PDF1View/Open


    All items in KSUIR are protected by copyright, with all rights reserved.


    本網站之所有圖文內容授權為崑山科技大學圖書資訊館所有,請勿任意轉載或擷取使用。
    ©Kun Shan University Library and Information Center
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback