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    Please use this identifier to cite or link to this item: http://ir.lib.ksu.edu.tw/handle/987654321/18767

    Title: 微波氫/氮電漿退火改善直線式連續濺鍍氧化鋅摻雜鋁薄膜之特性
    Microwave Hydrogen/Nitrogen Plasma Annealing to Improve the Electrical and Optical Properties of In-line Sputtered Aluminum doped Zinc Oxide Films
    Authors: 張慎周
    Date: 2012-10
    Issue Date: 2013-04-27 12:17:51 (UTC+8)
    Appears in Collections:[電機工程系所] 研究計畫

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