Kun Shan University Institutional Repository:Item 987654321/17439
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    题名: Pt/Al stacked metals gate MESFET
    作者: 黃文昌
    关键词: MESFET;InP;Schottky contact;Al2O3
    日期: 2011-05
    上传时间: 2012-09-10 14:02:30 (UTC+8)
    摘要: A new InP MESFET structure both with a gate structure of stacked metal and with a active channel of stacked layer is proposed. The gate metals are constituted by a double metal structure, Pt/Al. It improves the barrier height and reduces the reverse leakage current in the MFSFET. This is due to the formation of Al2O3, and becoming a Pt/Al/Al2O3/InP, metal-insulating-semiconductor structure in the gate region of the transistor. The conductive channel is constituted by a stack-layered structure, a n-InP layer and an i-InP layer. A transfer characteristics of excellent pitch off, and transconductance of 93 mS/mm is derived. It also shows a negative differential resistance effect on the MESFET. The illumination and temperature effect of the transistor are brought into discussed.
    關聯: Microelectronic Engineering, 88(5), 601-604
    显示于类别:[光電工程系所] 期刊論文


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