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    Please use this identifier to cite or link to this item: https://ir.lib.ksu.edu.tw/handle/987654321/10741

    Title: Analytical solution of flexural vibration responses on nanoscale processing using atomic force microscopy
    Authors: Thin-Lin Horng(洪興林)
    Contributor: 圖書資訊館
    Keywords: Modal superposition method
    Nanomachining process
    Flexural vibration problem
    Tip holder
    Atomic force microscope (AFM)
    Date: 2009
    ISSN: 09240136
    Issue Date: 2010-08-20 10:54:07 (UTC+8)
    Abstract: An analytical solution is developed to deal with the flexural vibration problem during a
    nanomachining process which involves an atomic force microscope (AFM) cantilever. The
    modal superposition method is employed to analyze the response of an AFM subjected to a
    cutting force with an excitation force of an arbitrarily chosen frequency. The cutting forces
    were transformed into distributed transversal and bending loading, and were applied to
    the end region of the AFM by means of the tip holder. The effects of transverse stress and
    bending stress were adopted to solve the dynamic model. Based on the result, applying a
    cutting force with an excitation force near the high-order modal frequencies and using a
    wide tip holder are recommended when nanoscale processing using AFM is performed.
    Appears in Collections:[機械工程系所] 期刊論文

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